The Investigation of E-beam Deposited Titanium Dioxide and Calcium Titanate Thin Films

Kristina BOČKUTĖ, Giedrius LAUKAITIS, Darius VIRBUKAS, Darius MILČIUS

Abstract


Thin titanium dioxide and calcium titanate films were deposited using electron beam evaporation technique. The substrate temperature during the deposition was changed from room temperature to 600 °C to test its influence on TiO2 film formation and optical properties. The properties of CaTiO3 were investigated also. For the evaluation of the structural properties the formed thin ceramic films were studied by X-ray diffraction (XRD), energy dispersive spectrometry (EDS), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Optical properties of thin TiO2 ceramics were investigated using optical spectroscope and the experimental data were collected in the ultraviolet-visible and near-infrared ranges with a step width of 1 nm. Electrical properties were investigated by impedance spectroscopy.It was found that substrate temperature has influence on the formed thin films density. The density increased when the substrate temperature increased. Substrate temperature had influence on the crystallographic, structural and optical properties also.

DOI: http://dx.doi.org/10.5755/j01.ms.19.3.1805


Keywords


electron beam evaporation; titanium oxide; calcium titanate; optical properties

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Print ISSN: 1392–1320
Online ISSN: 2029–7289